HLU-atea is a specialist in the cleaning of exhaust air for the semiconductor industry:

  • Air treatment plants
  • Counter-current scrubbers
  • Cross-flow scrubbers
  • Adsorbers
  • Thermal and regenerative oxidizers
  • Duct engineering (FM approved)

HLU-atea is able to collect and treat all the exhaust gases. We feed the acid and caustic exhaust into separate counter-current or cross-flow scrubberes. The solvent exhaust ist treated separately in thermal systems. The general exhaust is also collected separately and then discharged.

HLU-atea can manage the entire project, including piping and installation of all components. Competent, on-time and at a reasonable cost.