HLU-atea is a specialist in the cleaning of exhaust air for the semiconductor industry:
- Air treatment plants
- Counter-current scrubbers
- Cross-flow scrubbers
- Thermal and regenerative oxidizers
- Duct engineering (FM approved)
HLU-atea is able to collect and treat all the exhaust gases. We feed the acid and caustic exhaust into separate counter-current or cross-flow scrubberes. The solvent exhaust ist treated separately in thermal systems. The general exhaust is also collected separately and then discharged.
HLU-atea can manage the entire project, including piping and installation of all components. Competent, on-time and at a reasonable cost.